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Microfluidics and Nanofluidics

We study and develop new microfluidic and nanofluidic devices as well as their fabrication techniques mainly for microwave lab-on-chip applications. 

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Our current focus is on planar channels that enable broadband dielectric spectroscopy and electron spin resonance (ESR) spectroscopy of aqueous solutions. 

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We have built sub-10 nm nanofluidic channels with broadband RF transmission capabilities, which are promising to uncover new phenomena, such as confinement effects. 

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We also tested DI water in a microfluidic channel at a DC field of ~ 1 MV/cm, which is well above the ~ 30 kV/cm breakdown fields and enabled observation of nonlinear polarization behaviors of DI water.

10nm gap

wafer bonding

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